MEMS Lab - UTSA

 

MRL_Access

cLEANROOM process_materials msds

 

Process equipment

  Nanospec  Interferometer                          Surface Profiler                               Contact angleTool                    Thin film Stress measurement Tool
nanospec profiler contact_angle stree_measurement Vector Network Analyzer Hot Embosser Ellipsometer Tensile Tester vna hot_embosser Ellipsometer Tensile tester Porosimeter Agilent AFM FTIR Microscopes
Porosimeter AFM FTIR microscope1microscope2 Photolithography: UV Source Spin Coater Four Point probe Barrel Etcher
Lithography FPP barrel_ethcer LAM Etcher Sputter Coater
LAM_Etcher Sputter_coater

Coming Soon:

 

                                             Thermal Evaporator                                    Atomic Layer Deposition Tool
evaporator ALD